The surface conditions play an essential role for quartzware, in particular in semiconductor processes. E.g., in wafer carriers quartz is the only contact material for the wafers at high temperature. In addition, during deposition processes, the quartzware is also coated with thin films. This means, that the behavior of thin film deposition on quartz surfaces strongly influences the performance as well as the lifetime of the quartzware.
Heraeus Quarzglas uses comprehensive surface technologies to tailor specific surface conditions of quartzware like
- ground
- firepolished
- sandblasted
- SST (Special Surface Treatment)
